Inventor
SOLEIMANI HAMID R
US4 patents
Patents
4 patentsUS5596218AJan 21, 1997
Hot carrier-hard gate oxides by nitrogen implantation before gate oxidation
DIGITAL EQUIPMENT CORP178 citations98
US5330920AJul 19, 1994
Method of controlling gate oxide thickness in the fabrication of semiconductor devices
DIGITAL EQUIPMENT CORP125 citations97
US5316965AMay 31, 1994
Method of decreasing the field oxide etch rate in isolation technology
DIGITAL EQUIPMENT CORP117 citations97
US5385630AJan 31, 1995
Process for increasing sacrificial oxide etch rate to reduce field oxide loss
DIGITAL EQUIPMENT CORP52 citations95