Inventor
MA HSING-CHIEN
US5 patents
⚠️ This page may combine multiple inventors who share the name “MA HSING-CHIEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
4 patentsUS6734445B2May 11, 2004
Mechanized retractable pellicles and methods of use
INTEL CORP21 citations90
US6913706B2Jul 5, 2005
Double-metal EUV mask absorber
INTEL CORP13 citations80
US7102127B2Sep 5, 2006
Mechanized retractable pellicles and methods of use
INTEL CORP4 citations60
US7410733B2Aug 12, 2008
Dual-layer EUV mask absorber with trenches having opposing sidewalls that are straight and parallel
INTEL CORP2 citations59