Inventor

CHEGWIDDEN SCOTT R

US2 patents

Patents

2 patents

US6913706B2Jul 5, 2005

Double-metal EUV mask absorber

INTEL CORP13 citations80

US7410733B2Aug 12, 2008

Dual-layer EUV mask absorber with trenches having opposing sidewalls that are straight and parallel

INTEL CORP2 citations59