Inventor

YASUTOMI HIROYUKI

JP2 patents

Patents

2 patents

US6422227B1Jul 23, 2002

Dicing apparatus, kerf inspecting method and kerf inspecting system

TOKYO SEIMITSU CO LTD32 citations84

US7565002B2Jul 21, 2009

Wafer surface observation apparatus

TOKYO SEIMITSU CO LTD4 citations59