Inventor
LINDLEY ROGER ALAN
US13 patents
⚠️ This page may combine multiple inventors who share the name “LINDLEY ROGER ALAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS8382939B2Feb 26, 2013
Plasma processing chamber with enhanced gas delivery
APPLIED MATERIALS INC403 citations95
US10763150B2Sep 1, 2020
System for coupling a voltage to spatially segmented portions of the wafer with variable voltage
APPLIED MATERIALS INC42 citations94
US10688750B2Jun 23, 2020
Bonding structure of E chuck to aluminum base configuration
APPLIED MATERIALS INC13 citations93
US7374636B2May 20, 2008
Method and apparatus for providing uniform plasma in a magnetic field enhanced plasma reactor
APPLIED MATERIALS INC21 citations91
US7879186B2Feb 1, 2011
Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor
APPLIED MATERIALS INC7 citations84
US7422654B2Sep 9, 2008
Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor
APPLIED MATERIALS INC11 citations84
US7316199B2Jan 8, 2008
Method and apparatus for controlling the magnetic field intensity in a plasma enhanced semiconductor wafer processing chamber
APPLIED MATERIALS INC9 citations83
US10153139B2Dec 11, 2018
Multiple electrode substrate support assembly and phase control system
APPLIED MATERIALS INC2 citations73
US11192323B2Dec 7, 2021
Bonding structure of e chuck to aluminum base configuration
APPLIED MATERIALS INC1 citations72
US11794441B2Oct 24, 2023
Bonding structure of e chuck to aluminum base configuration
APPLIED MATERIALS INC0 citations62
US12444655B2Oct 14, 2025
Machine learning model for semiconductor manufacturing processes
APPLIED MATERIALS INC0 citations41