Inventor

KUWAHARA YUHEI

JP2 patents

Patents

2 patents

US9418834B2Aug 16, 2016

System and methods for spin-on coating of self-assembled monolayers or periodic organosilicates on a substrate

TOKYO ELECTRON LTD5 citations66

US8367308B2Feb 5, 2013

Substrate processing method

TOKYO ELECTRON LTD0 citations37