Inventor · disambiguated record

Kohtaro Kasashima

Also filed as: KASASHIMA KOHTARO

1 granted patent·0 citations·filing 2011–2011

9Inventor score

Technology areasG03F

Files withTAKINO HIDEO1

Top patents by PatentIndex Score

1 record

0133US9477156B2Reflecting optical member, optical system, exposure apparatus, and device manufacturing methodTAKINO HIDEO·Filed 2011·Granted Oct 25, 2016·0 cites·24 claims

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