Inventor
NGUYEN THANH X
US18 patents
⚠️ This page may combine multiple inventors who share the name “NGUYEN THANH X”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS8895450B2Nov 25, 2014
Low resistivity tungsten PVD with enhanced ionization and RF power coupling
APPLIED MATERIALS INC16 citations92
US9773665B1Sep 26, 2017
Particle reduction in a physical vapor deposition chamber
APPLIED MATERIALS INC9 citations84
US9633824B2Apr 25, 2017
Target for PVD sputtering system
APPLIED MATERIALS INC7 citations84
US10043670B2Aug 7, 2018
Systems and methods for low resistivity physical vapor deposition of a tungsten film
APPLIED MATERIALS INC4 citations72
US9960021B2May 1, 2018
Physical vapor deposition (PVD) target having low friction pads
APPLIED MATERIALS INC5 citations72
US9633839B2Apr 25, 2017
Methods for depositing dielectric films via physical vapor deposition processes
APPLIED MATERIALS INC2 citations72
US10734235B2Aug 4, 2020
Systems and methods for low resistivity physical vapor deposition of a tungsten film
APPLIED MATERIALS INC1 citations62
US11056325B2Jul 6, 2021
Methods and apparatus for substrate edge uniformity
APPLIED MATERIALS INC0 citations59
US10886113B2Jan 5, 2021
Process kit and method for processing a substrate
APPLIED MATERIALS INC0 citations52
US9281167B2Mar 8, 2016
Variable radius dual magnetron
APPLIED MATERIALS INC1 citations52
US9928997B2Mar 27, 2018
Apparatus for PVD dielectric deposition
APPLIED MATERIALS INC1 citations50
US10199204B2Feb 5, 2019
Target retaining apparatus
APPLIED MATERIALS INC0 citations46