Inventor

LUCE STEPHEN E

US53 patents

⚠️ This page may combine multiple inventors who share the name “LUCE STEPHEN E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LUCE STEPHEN E

IBM

Method of forming a self-aligned copper diffusion barrier in vias

CMOS imager array with recessed dielectric

Elimination of photo-induced electrochemical dissolution in chemical mechanical polishing

Bilayer metallization cap for photolithography

Crack stop for low K dielectrics

Stacked imager package

Stacked imager package

Exposed pore sealing post patterning

Non-conformal and oxidizable etch stops for submicron features

Method for applying photoresist

Protection of aluminum metallization against chemical attack during photoresist development

Crack stop for low K dielectrics

Elimination of photo-induced electrochemical dissolution in chemical mechanical polishing

Method of forming borderless contacts

Self-aligned last-metal C4 interconnection layer for Cu technologies

Method of manufacturing MEMS switches with reduced switching voltage

Integrated semiconductor devices with amorphous silicon beam, methods of manufacture and design structure

Exposed pore sealing post patterning

Method of forming a metal-insulator-metal capacitor for dual damascene interconnect processing and the device so formed

Method of forming a metal-insulator-metal capacitor for dual damascene interconnect processing and the device so formed

Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure

Stacked imager package

Bilayer aluminum last metal for interconnects and wirebond pads

Semiconductor chip and electronic module with integrated surface interconnects/components

Copper to aluminum interlayer interconnect using stud and via liner

Copper to aluminum interlayer interconnect using stud and via liner

Method of manufacturing MEMS switches with reduced switching voltage

Method of manufacturing a switch

Methods of manufacture for MEMS switches with reduced switching voltage

Methods of manufacturing for MEMS switches with reduced switching voltage

Method of manufacturing MEMS switches with reduced switching voltage

Method of manufacture MEMS switches with reduced voltage

Method of manufacturing MEMS switches with reduced switching volume

Field effect transistor and method of manufacture

Method of manufacturing MEMS switches with reduced voltage

Method of manufacturing a switch

MEMS switches with reduced switching voltage and methods of manufacture

Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure

Charge breakdown avoidance for MIM elements in SOI base technology and method

MEMS switches with reduced switching voltage and methods of manufacture

Double-sided integrated circuit chips

Resistor and design structure having resistor material length with sub-lithographic width

LUCE STEPHEN E

Integrated semiconductor devices with amorphous silicon beam, methods of manufacture and design structure

MEMS switches with reduced switching voltage and methods of manufacture

HAKEY MARK C

Structure having substantially parallel resistor material lengths

Resistor and design structure having substantially parallel resistor material lengths

HARAME DAVID L

Methods of manufacturing integrated semiconductor devices with single crystalline beam

BERNSTEIN KERRY

Three dimensional vertical E-fuse structures and methods of manufacturing the same

CLARK JR WILLIAM F

Charge breakdown avoidance for MIM elements in SOI base technology and method

BOTULA ALAN B

Field effect transistor and method of manufacture