Inventor
MELNICHUK ANN
US6 patents
Patents
6 patentsUS11680337B2Jun 20, 2023
Fabrication of films having controlled stoichiometry using molecular beam epitaxy
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Isolation of waveguide-integrated detectors using a back end of line process
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Method and structure to incorporate multiple low loss photonic circuit components
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Photonic integrated circuit
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Fabrication of films having controlled stoichiometry using molecular beam epitaxy
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Silicon nitride films having reduced interfacial strain
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