Inventor
MOINPOUR MONSOUR
US3 patents
Patents
3 patentsUS5901399AMay 11, 1999
Flexible-leaf substrate edge cleaning apparatus
INTEL CORP53 citations94
US5725414AMar 10, 1998
Apparatus for cleaning the side-edge and top-edge of a semiconductor wafer
INTEL CORP82 citations94
US6357071B2Mar 19, 2002
Rotating belt wafer edge cleaning apparatus
INTEL CORP12 citations71