Inventor
BERMAN ILAN
US6 patents
Patents
6 patentsUS5868857AFeb 9, 1999
Rotating belt wafer edge cleaning apparatus
INTEL CORP91 citations97
US5901399AMay 11, 1999
Flexible-leaf substrate edge cleaning apparatus
INTEL CORP53 citations94
US5725414AMar 10, 1998
Apparatus for cleaning the side-edge and top-edge of a semiconductor wafer
INTEL CORP82 citations94
US6475293B1Nov 5, 2002
Rotating belt wafer edge cleaning apparatus
INTEL CORP31 citations92
US6092253AJul 25, 2000
Flexible-leaf substrate edge cleaning apparatus
INTEL CORP38 citations92
US6357071B2Mar 19, 2002
Rotating belt wafer edge cleaning apparatus
INTEL CORP12 citations71