Inventor
BOTMAN AURELIEN PHILIPPE JEAN MACLOU
US11 patents
⚠️ This page may combine multiple inventors who share the name “BOTMAN AURELIEN PHILIPPE JEAN MACLOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FEI CO
8 patentsUS12061159B2Aug 13, 2024
Particle-induced x-ray emission (PIXE) using hydrogen and multi-species focused ion beams
FEI CO2 citations68
US9478390B2Oct 25, 2016
Integrated light optics and gas delivery in a charged particle lens
FEI CO0 citations50
US9812286B2Nov 7, 2017
Localized, in-vacuum modification of small structures
FEI CO0 citations49
US9899181B1Feb 20, 2018
Collision ionization ion source
FEI CO0 citations48
US10325750B2Jun 18, 2019
Collision ionization source
FEI CO0 citations47
US10777383B2Sep 15, 2020
Method for alignment of a light beam to a charged particle beam
FEI CO0 citations45
US10415133B2Sep 17, 2019
Adaptive beam current for high throughput patterning
FEI CO0 citations39
US10105734B2Oct 23, 2018
Method of modifying a sample surface layer from a microscopic sample
FEI CO0 citations39
BOTMAN AURELIEN PHILIPPE JEAN MACLOU
3 patentsUS8853078B2Oct 7, 2014
Method of depositing material
BOTMAN AURELIEN PHILIPPE JEAN MACLOU9 citations81
US8168948B2May 1, 2012
Method of machining a work piece with a focused particle beam
BOTMAN AURELIEN PHILIPPE JEAN MACLOU6 citations69
US9255339B2Feb 9, 2016
Localized, in-vacuum modification of small structures
BOTMAN AURELIEN PHILIPPE JEAN MACLOU0 citations48