Inventor
KELLEY FRANCIS J
US3 patents
Patents
3 patentsUS7303993B2Dec 4, 2007
Chemical mechanical polishing compositions and methods relating thereto
ROHM & HAAS ELECT MAT9 citations71
US7384871B2Jun 10, 2008
Chemical mechanical polishing compositions and methods relating thereto
ROHM & HAAS ELECT MAT3 citations60
US7497967B2Mar 3, 2009
Compositions and methods for polishing copper
ROHM & HAAS ELECT MAT0 citations49