Inventor
RODY YVES
FR2 patents
Patents
2 patentsUS8370773B2Feb 5, 2013
Method and apparatus for designing an integrated circuit using inverse lithography technology
FREESCALE SEMICONDUCTOR INC4 citations54
US7615318B2Nov 10, 2009
Printing of design features using alternating PSM technology with double mask exposure strategy
FREESCALE SEMICONDUCTOR INC0 citations30