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Inventor
BEALE STUART
US
4 patents
⚠️ This page may combine multiple inventors who share the name “BEALE STUART”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
3 patents
US7904182B2
Mar 8, 2011
Scalable motion control system
BROOKS AUTOMATION INC
41 citations
94
US7522267B2
Apr 21, 2009
Substrate transport apparatus with automated alignment
BROOKS AUTOMATION INC
14 citations
83
US10488851B2
Nov 26, 2019
Scalable motion control system
BROOKS AUTOMATION INC
2 citations
71
HOSEK MARTIN
1 patent
US9020617B2
Apr 28, 2015
Scalable motion control system
HOSEK MARTIN
1 citations
60