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Inventor
BOTEV ROUMEN
US
6 patents
⚠️ This page may combine multiple inventors who share the name “BOTEV ROUMEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
3 patents
US7904182B2
Mar 8, 2011
Scalable motion control system
BROOKS AUTOMATION INC
41 citations
94
US11476139B2
Oct 18, 2022
Substrate process apparatus
BROOKS AUTOMATION INC
8 citations
84
US10488851B2
Nov 26, 2019
Scalable motion control system
BROOKS AUTOMATION INC
2 citations
71
BROOKS AUTOMATION US LLC
2 patents
US11862498B2
Jan 2, 2024
Substrate processing apparatus
BROOKS AUTOMATION US LLC
2 citations
71
US12266554B2
Apr 1, 2025
Substrate processing apparatus
BROOKS AUTOMATION US LLC
0 citations
60
HOSEK MARTIN
1 patent
US9020617B2
Apr 28, 2015
Scalable motion control system
HOSEK MARTIN
1 citations
60