Inventor
IVES MARK
US6 patents
⚠️ This page may combine multiple inventors who share the name “IVES MARK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
5 patentsUS7904182B2Mar 8, 2011
Scalable motion control system
BROOKS AUTOMATION INC41 citations94
US6530732B1Mar 11, 2003
Single substrate load lock with offset cool module and buffer chamber
BROOKS AUTOMATION INC59 citations93
US6079928AJun 27, 2000
Dual plate gas assisted heater module
BROOKS AUTOMATION INC24 citations89
US10488851B2Nov 26, 2019
Scalable motion control system
BROOKS AUTOMATION INC2 citations71
US6231289B1May 15, 2001
Dual plate gas assisted heater module
BROOKS AUTOMATION INC6 citations60