Inventor
VERHAEGEN GUSTAAF
BE3 patents
⚠️ This page may combine multiple inventors who share the name “VERHAEGEN GUSTAAF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
2 patentsUS7704850B2Apr 27, 2010
Semiconductor device for measuring an overlay error, method for measuring an overlay error, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations60
US7786477B2Aug 31, 2010
Semiconductor device for measuring an overlay error, method for measuring an overlay error, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations49