Inventor

KAWAMURA SHIGERU

JP7 patents

⚠️ This page may combine multiple inventors who share the name “KAWAMURA SHIGERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents

US6800546B2Oct 5, 2004

Film forming method by radiating a plasma on a surface of a low dielectric constant film

TOKYO ELECTRON LTD20 citations92

US6528108B1Mar 4, 2003

Method and apparatus for observing porous amorphous film, and method and apparatus for forming the same

TOKYO ELECTRON LTD29 citations89

US7923680B2Apr 12, 2011

Analysis method and analysis apparatus

TOKYO ELECTRON LTD0 citations47

KAWAMURA SHIGERU

2 patents

US8647440B2Feb 11, 2014

Substrate processing method and substrate processing apparatus

KAWAMURA SHIGERU3 citations57

US8945412B2Feb 3, 2015

Substrate cleaning apparatus, substrate cleaning method, and substrate processing apparatus

KAWAMURA SHIGERU0 citations36

CLARION CO LTD

1 patent

US4481483ANov 6, 1984

Low distortion amplifier circuit

CLARION CO LTD9 citations71

DENSO CORP

1 patent

US6407404B1Jun 18, 2002

Apparatus for the examining defect of monolithic substrate and method for examining the same

DENSO CORP5 citations61