Inventor

CHAE CHEUL OCK

KR2 patents

Patents

2 patents

US9733196B2Aug 15, 2017

Upper surface foreign material detecting device of ultra-thin transparent substrate

NANOPROTECH CO LTD2 citations64

US9316598B2Apr 19, 2016

Method of detecting foreign material on upper surface of transparent substrate using polarized light

NANOPROTECH CO LTD0 citations33