Inventor
SHE MING-SHIUAN
TW7 patents
⚠️ This page may combine multiple inventors who share the name “SHE MING-SHIUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS11529712B2Dec 20, 2022
CMP polishing head design for improving removal rate uniformity
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10160091B2Dec 25, 2018
CMP polishing head design for improving removal rate uniformity
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12269141B2Apr 8, 2025
Fabrication of a polishing pad for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11865666B2Jan 9, 2024
CMP polishing head design for improving removal rate uniformity
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11697183B2Jul 11, 2023
Fabrication of a polishing pad for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61