Inventor · disambiguated record
Mitsuharu Shimoda
Also filed as: SHIMODA MITSUHARU
2 granted patents·2 pending applications·1 citations·filing 2018–2023
33Inventor score
Top patents by PatentIndex Score
4 records- 0168US11315797B2Plasma etching method using gas molecule containing sulfur atomKANTO DENKA KOGYO KK·Filed 2019·Granted Apr 26, 2022·1 cites·9 claims
- 0266US12261050B2Method of manufacturing semiconductor device, and etching gasKIOXIA CORP·Filed 2023·Granted Mar 25, 2025·0 cites·12 claims
- 0356US2021193475A1Method of manufacturing semiconductor device, and etching gasKIOXIA CORP·Filed 2021·Application pending·0 cites
- 0437US2020377434A1Method of producing compound having butadiene skeleton containing hydrogen and fluorine and/or chlorineKANTO DENKA KOGYO KK·Filed 2018·Application pending·0 cites
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