Inventor
ITO KIWAMU
JP3 patents
Patents
3 patentsUS12131889B2Oct 29, 2024
Plasma generating apparatus, plasma processing apparatus, and plasma processing method
TOKYO ELECTRON LTD2 citations71
US11694890B2Jul 4, 2023
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD2 citations63
US12469694B2Nov 11, 2025
Film forming method
TOKYO ELECTRON LTD0 citations59