Inventor
Chang Yun-Tzu
TW8 patents
Patents
8 patentsUS10074725B1Sep 11, 2018
Semiconductor structure and manufacturing method thereof
UNITED MICROELECTRONICS CORP5 citations82
US9728467B2Aug 8, 2017
Method for modulating work function of semiconductor device having metal gate structure by gas treatment
UNITED MICROELECTRONICS CORP3 citations71
US11139384B2Oct 5, 2021
Method for fabricating semiconductor device
UNITED MICROELECTRONICS CORP0 citations61
US10340350B2Jul 2, 2019
Semiconductor structure and manufacturing method thereof
UNITED MICROELECTRONICS CORP0 citations51
US9691704B1Jun 27, 2017
Semiconductor structure and method for manufacturing the same
UNITED MICROELECTRONICS CORP0 citations51
US9478628B1Oct 25, 2016
Metal gate forming process
UNITED MICROELECTRONICS CORP1 citations51
US10490643B2Nov 26, 2019
Semiconductor device and method for fabricating the same
UNITED MICROELECTRONICS CORP0 citations50
US9576803B2Feb 21, 2017
Method for tuning metal gate work function before contact formation in fin-shaped field effect transistor manufacturing process
UNITED MICROELECTRONICS CORP0 citations39