Inventor
HAHM SANG-KYU
KR4 patents
Patents
4 patentsUS6150185ANov 21, 2000
Methods of manufacturing and testing integrated circuit field effect transistors using scanning electron microscope to detect undesired conductive material
SAMSUNG ELECTRONICS CO LTD9 citations72
US5654205AAug 5, 1997
Apparatus and method for depositing particles onto a wafer
SAMSUNG ELECTRONICS CO LTD5 citations71
US6111637AAug 29, 2000
Apparatus and method for examining wafers
SAMSUNG ELECTRONICS CO LTD7 citations67
US5746832AMay 5, 1998
Apparatus for depositing particles onto a wafer
SAMSUNG ELECTRONICS CO LTD3 citations60