Inventor
CHUNG ARMY
TW4 patents
Patents
4 patentsUS5413963AMay 9, 1995
Method for depositing an insulating interlayer in a semiconductor metallurgy system
UNITED MICROELECTRONICS CORP52 citations88
US6153360ANov 28, 2000
Method of removing photo-resist
UNITED MICROELECTRONICS CORP5 citations70
US6283134B1Sep 4, 2001
Apparatus for removing photo-resist
UNITED MICROELECTRONICS CORP3 citations59
US6007953ADec 28, 1999
Method of avoiding peeling on wafer edge and mark number
UNITED MICROELECTRONICS CORP0 citations51