Inventor
NAULT MICHAEL P
US10 patents
⚠️ This page may combine multiple inventors who share the name “NAULT MICHAEL P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS6583071B1Jun 24, 2003
Ultrasonic spray coating of liquid precursor for low K dielectric coatings
APPLIED MATERIALS INC146 citations99
US6190233B1Feb 20, 2001
Method and apparatus for improving gap-fill capability using chemical and physical etchbacks
APPLIED MATERIALS INC277 citations98
US5990000ANov 23, 1999
Method and apparatus for improving gap-fill capability using chemical and physical etchbacks
APPLIED MATERIALS INC270 citations97
US6875687B1Apr 5, 2005
Capping layer for extreme low dielectric constant films
APPLIED MATERIALS INC113 citations96
US6576568B2Jun 10, 2003
Ionic additives for extreme low dielectric constant chemical formulations
APPLIED MATERIALS INC29 citations91
US6896955B2May 24, 2005
Ionic additives for extreme low dielectric constant chemical formulations
APPLIED MATERIALS INC16 citations90
US6843881B2Jan 18, 2005
Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber
APPLIED MATERIALS INC17 citations83
AIR PROD & CHEM
3 patentsUS6818289B2Nov 16, 2004
Mesoporous films having reduced dielectric constants
AIR PROD & CHEM17 citations91
US6592980B1Jul 15, 2003
Mesoporous films having reduced dielectric constants
AIR PROD & CHEM39 citations91
US7265062B2Sep 4, 2007
Ionic additives for extreme low dielectric constant chemical formulations
AIR PROD & CHEM6 citations60