Inventor
KIM CHOUNG-HEE
KR4 patents
Patents
4 patentsUS5729856AMar 24, 1998
Semiconductor wafer cleaning apparatus
SAMSUNG ELECTRONICS CO LTD48 citations89
US5733690AMar 31, 1998
Reticle for fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD26 citations86
US6888261B2May 3, 2005
Alignment mark and exposure alignment system and method using the same
SAMSUNG ELECTRONICS CO LTD12 citations83
US6667253B2Dec 23, 2003
Alignment mark and exposure alignment system and method using the same
SAMSUNG ELECTRONICS CO LTD8 citations68