Inventor
VITALE STEVEN ARTHUR
US5 patents
Patents
5 patentsUS7494882B2Feb 24, 2009
Manufacturing a semiconductive device using a controlled atomic layer removal process
TEXAS INSTRUMENTS INC515 citations94
US7687396B2Mar 30, 2010
Method of forming silicided gates using buried metal layers
TEXAS INSTRUMENTS INC4 citations60
US7892957B2Feb 22, 2011
Gate CD trimming beyond photolithography
TEXAS INSTRUMENTS INC0 citations48
US7439106B2Oct 21, 2008
Gate CD trimming beyond photolithography
TEXAS INSTRUMENTS INC0 citations48
US7910289B2Mar 22, 2011
Use of dual mask processing of different composition such as inorganic/organic to enable a single poly etch using a two-print-two-etch approach
TEXAS INSTRUMENTS INC0 citations39