Inventor
DOZORETZ PAUL
US10 patents
Patents
10 patentsUS6197119B1Mar 6, 2001
Method and apparatus for controlling polymerized teos build-up in vacuum pump lines
MKS INSTR INC109 citations97
US6361607B2Mar 26, 2002
Apparatus for controlling polymerized teos build-up in vacuum pump lines
MKS INSTR INC25 citations92
US7962294B2Jun 14, 2011
Integrated absolute and differential pressure transducer
MKS INSTR INC15 citations91
US6909975B2Jun 21, 2005
Integrated absolute and differential pressure transducer
MKS INSTR INC22 citations91
US6562109B2May 13, 2003
Acceleration assisted particle/gas separation system
MKS INSTR INC22 citations90
US7871587B2Jan 18, 2011
Reactive chemical containment system
MKS INSTR INC7 citations83
US7477996B2Jan 13, 2009
Integrated absolute and differential pressure transducer
MKS INSTR INC10 citations82
US10021739B2Jul 10, 2018
Trimmable heater
MKS INSTR INC5 citations70
US9686821B2Jun 20, 2017
Streamlined heater assembly with front and intermediate daisy chain power injection, shielding, and water resistant features
MKS INSTR INC4 citations70
US6895178B2May 17, 2005
Vapor delivery system
MKS INSTR INC5 citations57