Inventor
HOLCOMB GARRY
US5 patents
Patents
5 patentsUS7962294B2Jun 14, 2011
Integrated absolute and differential pressure transducer
MKS INSTR INC15 citations91
US6909975B2Jun 21, 2005
Integrated absolute and differential pressure transducer
MKS INSTR INC22 citations91
US6672171B2Jan 6, 2004
Combination differential and absolute pressure transducer for load lock control
MKS INSTR INC37 citations90
US7477996B2Jan 13, 2009
Integrated absolute and differential pressure transducer
MKS INSTR INC10 citations82
US7076920B2Jul 18, 2006
Method of using a combination differential and absolute pressure transducer for controlling a load lock
MKS INSTR INC14 citations79