Inventor
RAHTU ANTTI
FI13 patents
⚠️ This page may combine multiple inventors who share the name “RAHTU ANTTI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INT NV
4 patentsUS9831094B2Nov 28, 2017
Enhanced thin film deposition
ASM INT NV13 citations92
US9587307B2Mar 7, 2017
Enhanced deposition of noble metals
ASM INT NV5 citations82
US10964534B2Mar 30, 2021
Enhanced thin film deposition
ASM INT NV3 citations73
US10297444B2May 21, 2019
Enhanced thin film deposition
ASM INT NV2 citations73
ASM INT
4 patentsUS7704896B2Apr 27, 2010
Atomic layer deposition of thin films on germanium
ASM INT18 citations84
US8025922B2Sep 27, 2011
Enhanced deposition of noble metals
ASM INT10 citations83
US6932867B2Aug 23, 2005
Method for growing thin oxide films
ASM INT11 citations72
US9127351B2Sep 8, 2015
Enhanced thin film deposition
ASM INT1 citations63