Inventor
OSHEMKOV SERGEY
IL10 patents
⚠️ This page may combine multiple inventors who share the name “OSHEMKOV SERGEY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
3 patentsUS10670955B2Jun 2, 2020
Critical dimension variation correction in extreme ultraviolet lithography
ZEISS CARL SMT GMBH3 citations67
US10095101B2Oct 9, 2018
Critical dimension variation correction in extreme ultraviolet lithography
ZEISS CARL SMT GMBH2 citations67
US11774870B2Oct 3, 2023
Method for removing a particle from a mask system
ZEISS CARL SMT GMBH0 citations55
OSHEMKOV SERGEY
3 patentsUS9034539B2May 19, 2015
Controllable transmission and phase compensation of transparent material
OSHEMKOV SERGEY2 citations57
US8101921B2Jan 24, 2012
Apparatus and method for inducing controllable jets in liquids
OSHEMKOV SERGEY3 citations56
US8735030B2May 27, 2014
Method and apparatus for modifying a substrate surface of a photolithographic mask
OSHEMKOV SERGEY0 citations46