Inventor

KLAESGES RALPH

DE3 patents

⚠️ This page may combine multiple inventors who share the name “KLAESGES RALPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OSHEMKOV SERGEY

2 patents

US9034539B2May 19, 2015

Controllable transmission and phase compensation of transparent material

OSHEMKOV SERGEY2 citations57

US8735030B2May 27, 2014

Method and apparatus for modifying a substrate surface of a photolithographic mask

OSHEMKOV SERGEY0 citations46

ZEISS CARL SMT AG

1 patent

US7019824B2Mar 28, 2006

Moire method and measuring system for measuring the distortion of an optical imaging system

ZEISS CARL SMT AG11 citations81