Inventor

KRUGLYAKOV VLADIMIR

IL4 patents

⚠️ This page may combine multiple inventors who share the name “KRUGLYAKOV VLADIMIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

2 patents

US10670955B2Jun 2, 2020

Critical dimension variation correction in extreme ultraviolet lithography

ZEISS CARL SMT GMBH3 citations67

US10095101B2Oct 9, 2018

Critical dimension variation correction in extreme ultraviolet lithography

ZEISS CARL SMT GMBH2 citations67

OSHEMKOV SERGEY

1 patent

US9034539B2May 19, 2015

Controllable transmission and phase compensation of transparent material

OSHEMKOV SERGEY2 citations57

ZEISS CARL SMS LTD

1 patent

US9690191B2Jun 27, 2017

Surface defect repair by irradiation

ZEISS CARL SMS LTD0 citations46