Inventor
KISHIUME Tsukasa
JP3 patents
Patents
3 patentsUS9352073B2May 31, 2016
Functional film
NIKON CORP0 citations45
US9057955B2Jun 16, 2015
Functional film, liquid immersion member, method of manufacturing liquid immersion member, exposure apparatus, and device manufacturing method
NIKON CORP1 citations45
US9719164B2Aug 1, 2017
Method of manufacturing compound film
NIKON CORP0 citations42