Inventor
VORONIN SERGEY A
US7 patents
Patents
7 patentsUS10237916B2Mar 19, 2019
Systems and methods for ESC temperature control
TOKYO ELECTRON LTD7 citations82
US9155183B2Oct 6, 2015
Adjustable slot antenna for control of uniformity in a surface wave plasma source
TOKYO ELECTRON LTD3 citations60
US9101042B2Aug 4, 2015
Control of uniformity in a surface wave plasma source
TOKYO ELECTRON LTD2 citations60
US10811273B2Oct 20, 2020
Methods of surface restoration for nitride etching
TOKYO ELECTRON LTD0 citations48
US10083820B2Sep 25, 2018
Dual-frequency surface wave plasma source
TOKYO ELECTRON LTD0 citations48
US9530626B2Dec 27, 2016
Method and apparatus for ESC charge control for wafer clamping
TOKYO ELECTRON LTD0 citations48
US10204832B2Feb 12, 2019
Method of patterning intersecting structures
TOKYO ELECTRON LTD0 citations39