Inventor
SUNDBERG LINDA K
US15 patents
⚠️ This page may combine multiple inventors who share the name “SUNDBERG LINDA K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
13 patentsUS7678537B2Mar 16, 2010
Graded topcoat materials for immersion lithography
IBM44 citations92
US10174229B2Jan 8, 2019
Adhesive resins for wafer bonding
IBM2 citations72
US9057960B2Jun 16, 2015
Resist performance for the negative tone develop organic development process
IBM4 citations72
US10020199B1Jul 10, 2018
Porous tin oxide films
IBM2 citations68
US11500285B2Nov 15, 2022
Multifunctional polymers
IBM0 citations62
US10345700B2Jul 9, 2019
Negative-tone resist compositions and multifunctional polymers therein
IBM1 citations62
US8900802B2Dec 2, 2014
Positive tone organic solvent developed chemically amplified resist
IBM3 citations62
US7993812B2Aug 9, 2011
Calixarene blended molecular glass photoresists and processes of use
IBM4 citations61
US7951524B2May 31, 2011
Self-topcoating photoresist for photolithography
IBM3 citations57
US9850406B2Dec 26, 2017
Adhesive resins for wafer bonding
IBM1 citations51
US10915023B2Feb 9, 2021
Nitrogen heterocycle-containing monolayers on metal oxides for binding biopolymers
IBM0 citations49
US9389516B2Jul 12, 2016
Resist performance for the negative tone develop organic development process
IBM0 citations48
US10236184B2Mar 19, 2019
Porous tin oxide films
IBM0 citations47