Inventor
CHANG JIN-HUAI
TW2 patents
Patents
2 patentsUS11211257B2Dec 28, 2021
Semiconductor device fabrication with removal of accumulation of material from sidewall
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations64
US12014933B2Jun 18, 2024
Semiconductor device fabrication with removal of accumulation of material from sidewall
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations53