Inventor
AKATSUKA YUJI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “AKATSUKA YUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGK INSULATORS LTD
6 patentsUS11715652B2Aug 1, 2023
Member for semiconductor manufacturing apparatus
NGK INSULATORS LTD3 citations71
US11837490B2Dec 5, 2023
Electrostatic chuck heater
NGK INSULATORS LTD0 citations61
US12009245B2Jun 11, 2024
Member for semiconductor manufacturing apparatus and method for manufacturing the same
NGK INSULATORS LTD1 citations59
US11398401B2Jul 26, 2022
Wafer mounting table and method of manufacturing the same
NGK INSULATORS LTD0 citations51
US12191183B2Jan 7, 2025
Wafer placement table and method of manufacturing the same
NGK INSULATORS LTD0 citations50
US12027385B2Jul 2, 2024
Ceramic heater
NGK INSULATORS LTD0 citations50