Inventor
HENNUS PIETER RENAAT MARIA
BE11 patents
⚠️ This page may combine multiple inventors who share the name “HENNUS PIETER RENAAT MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS7791709B2Sep 7, 2010
Substrate support and lithographic process
ASML NETHERLANDS BV11 citations82
US7365827B2Apr 29, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations81
US7397539B2Jul 8, 2008
Transfer apparatus for transferring an object, lithographic apparatus employing such a transfer apparatus, and method of use thereof
ASML NETHERLANDS BV10 citations76
US7123349B2Oct 17, 2006
Lithographic projection assembly, substrate handling apparatus and substrate handling method
ASML NETHERLANDS BV5 citations60
US7405810B2Jul 29, 2008
Method and apparatus for positioning a substrate on a substrate table
ASML NETHERLANDS BV3 citations59
US9494869B2Nov 15, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations50
US10578959B2Mar 3, 2020
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations49
US12449726B2Oct 21, 2025
Apparatus for assembly of a reticle assembly
ASML NETHERLANDS BV0 citations48