Inventor
NISHIDA TOSHIHIKO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “NISHIDA TOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
4 patentsUS7321418B2Jan 22, 2008
Stage apparatus, exposure apparatus, and device manufacturing method
CANON KK11 citations83
US11415882B2Aug 16, 2022
Template for imprint and imprint method using template
CANON KK2 citations69
US12174531B2Dec 24, 2024
Imprint apparatus, imprint method, and method of manufacturing article
CANON KK0 citations50
US12138847B2Nov 12, 2024
Imprint apparatus, imprint method, method of manufacturing article, determination method, and non-transitory computer-readable storage medium
CANON KK0 citations50