Inventor
WEED ALLAN D
US9 patents
⚠️ This page may combine multiple inventors who share the name “WEED ALLAN D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
4 patentsUS7010388B2Mar 7, 2006
Work-piece treatment system having load lock and buffer
AXCELIS TECH INC35 citations91
US9911636B1Mar 6, 2018
Multiple diameter in-vacuum wafer handling
AXCELIS TECH INC3 citations71
US6914251B1Jul 5, 2005
Alignment structure and method for mating a wafer delivery device to a wafer treatment tool
AXCELIS TECH INC9 citations69
US10186446B2Jan 22, 2019
Adjustable circumference electrostatic clamp
AXCELIS TECH INC1 citations60