Inventor

FONG KELLY

US3 patents

⚠️ This page may combine multiple inventors who share the name “FONG KELLY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US6387207B1May 14, 2002

Integration of remote plasma generator with semiconductor processing chamber

APPLIED MATERIALS INC944 citations97

US6506994B2Jan 14, 2003

Low profile thick film heaters in multi-slot bake chamber

APPLIED MATERIALS INC22 citations92

KENWORTHY IAN JARED

1 patent

US8469368B2Jun 25, 2013

Edge rings for electrostatic chucks

KENWORTHY IAN JARED16 citations74