Inventor
KRIKKE JAN JAAP
NL2 patents
Patents
2 patentsUS6583855B2Jun 24, 2003
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV41 citations89
US7030958B2Apr 18, 2006
Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method
ASML NETHERLANDS BV31 citations88