Inventor

BARZILAI JESSICA

US3 patents

Patents

3 patents

US6635115B1Oct 21, 2003

Tandem process chamber

APPLIED MATERIALS INC500 citations98

US6152070ANov 28, 2000

Tandem process chamber

APPLIED MATERIALS INC455 citations98

US7655092B2Feb 2, 2010

Tandem process chamber

APPLIED MATERIALS INC27 citations91