Inventor
BOWLEY JR REGINALD R
US4 patents
Patents
4 patentsUS6944578B2Sep 13, 2005
Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus
IBM9 citations69
US6917901B2Jul 12, 2005
Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus
IBM8 citations69
US6414308B1Jul 2, 2002
Method for determining opened/unopened semiconductor contacts using a scanning electron microscope
IBM12 citations69
US6683306B2Jan 27, 2004
Array foreshortening measurement using a critical dimension scanning electron microscope
IBM1 citations47