Inventor
FISCH EMILY E
US8 patents
⚠️ This page may combine multiple inventors who share the name “FISCH EMILY E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
6 patentsUS6276370B1Aug 21, 2001
Sonic cleaning with an interference signal
IBM90 citations97
US6282459B1Aug 28, 2001
Structure and method for detection of physical interference during transport of an article
IBM37 citations92
US6577406B2Jun 10, 2003
Structure for lithographic focus control features
IBM16 citations83
US7332054B2Feb 19, 2008
Etch apparatus
IBM8 citations71
US6777137B2Aug 17, 2004
EUVL mask structure and method of formation
IBM7 citations69
US6683306B2Jan 27, 2004
Array foreshortening measurement using a critical dimension scanning electron microscope
IBM1 citations47