Inventor
MIURA NAKAJI
JP3 patents
Patents
3 patentsUS6884154B2Apr 26, 2005
Method for apparatus for polishing outer peripheral chamfered part of wafer
SHINETSU HANDOTAI KK130 citations95
US5806137ASep 15, 1998
Washing of wafers and wafer washing and drying apparatus
SHINETSU HANDOTAI KK35 citations87
US6074442AJun 13, 2000
Method of separating slice base mounting member from wafer and jig adapted therefor
SHINETSU HANDOTAI KK5 citations59